Buffer layer structures for stabilization of a lithium niobate device

    公开(公告)号:US20030128954A1

    公开(公告)日:2003-07-10

    申请号:US10143885

    申请日:2002-05-14

    CPC classification number: G02F1/035 G02F1/225 G02F2201/07 G02F2203/21

    Abstract: An optical waveguide device including an electro-optical crystal substrate having a top surface and a bottom surface; an optical waveguide path formed within a surface of the electro-optical crystal substrate; at least one electrode positioned above the optical waveguide path for applying an electric field to the optical waveguide path; and a silicon titanium oxynitride layer and a connecting layer for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed.

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