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1.发明授权公开(公告)号：US11313783B2
公开(公告)日：2022-04-26
申请号：US16346760
申请日：2017-11-08
Applicant: DALIAN UNIVERSITY OF TECHNOLOGY
Inventor： Ping Zhou , Ning Huang , Renke Kang , Dongming Guo , Ying Yan
IPC: G01N15/10
Abstract: A nanometer cutting depth high-speed single-point scratch test device includes a workbench, an air-bearing turntable, a test piece fixture, a test piece, a Z-direction feeding device, a nano positioning stage, a force sensor and a scratch tool. A micro convex structure with controllable length and height is machined in a position of the test piece to be scratched.
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