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公开(公告)号:US20160124305A1
公开(公告)日:2016-05-05
申请号:US14897478
申请日:2014-06-06
Applicant: DEXERIALS CORPORATION
Inventor: Makiya ITO , Ryosuke ENDO , KyungSung YUN , Hirofumi KONDO
IPC: G03F7/038
Abstract: To provide a production method of a pattern-formed body, which can simply provide a pattern with surface free energy differences. A cured resin layer, to which a pattern of a master (20) has been transferred, is formed on a base (11), by applying a resin composition (12) containing a first compound exhibiting low surface free energy, and a second compound exhibiting surface free energy higher than the surface free energy of the first compound, on the base (11), and curing the resin composition (12) with bringing the resin composition into contact with a master (20), to which a pattern has been formed with surface free energy differences.
Abstract translation: 为了提供一种能够简单地提供具有表面自由能差的图案的图案形成体的制造方法。 通过涂布含有表现出低表面自由能的第一化合物的树脂组合物(12)和第二化合物(12),在基材(11)上形成已经转印了母料(20)的图案的固化树脂层 在基体(11)上表现出比第一化合物的表面自由能高的表面自由能,并且使树脂组合物与已经形成图案的母料(20)接触来固化树脂组合物(12) 形成表面自由能差异。