REGULATOR ASSEMBLY AND TEST METHOD

    公开(公告)号:US20210341106A1

    公开(公告)日:2021-11-04

    申请号:US17244650

    申请日:2021-04-29

    Applicant: ENTEGRIS, INC.

    Abstract: Regulator assemblies can be tested using test fluids selected to have a molecular weight about that of a selected fluid to be dispensed from a fluid storage and delivery vessel including the regulator assembly. The test fluid can be a single gas or a mixture. The test fluid can have a molecular weight of between 80% and 110% of the molecular weight of the selected fluid dispensed from the fluid storage and delivery vessel. Regulator assemblies tested in this manner can pass evaluation when they show fewer than two spikes on the initiation of flow of the test gas. These regulator assemblies can be installed into fluid storage and delivery vessels, particularly for storage and delivery of pressurized fluids.

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