Abstract:
A photoelectric conversion device according to an exemplary embodiment includes a first substrate, a photoelectric conversion layer disposed above the first substrate, a second substrate which is different from the first substrate and disposed on the photoelectric conversion layer, and a nano pillar layer disposed above the second substrate in which the nano pillar layer includes a plurality of nano pillars which is spaced apart from each other, so as to easily absorb the light.
Abstract:
Disclosed is an integral label-free biosensor capable of analyzing a biomolecule with high sensitivity by integrating a light source, a photodetector, an optical waveguide, and a microcantilever on a substrate, and a method of detecting a bio-antigen by using the same. The integral label-free biosensor according to the present invention may be manufactured with low cost, be easily integrated with a silicon electron device, and detect a biomolecule with high sensitivity by using a label-free method.