公开(公告)号：US20190293685A1

公开(公告)日：2019-09-26

申请号：US16362239

申请日：2019-03-22

Applicant: FormFactor, Inc.

Inventor： January Kister ,  Chun-Chih Wang

IPC: G01R1/067 ,  G01R3/00

Abstract: A skate on a tip of a probe for testing electrical devices is a reduced thickness probe tip contact. Such a skate can advantageously increase contact pressure, but it can also undesirably reduce probe lifetime due to rapid mechanical wear of the skate. Here multilayer skate probes are provided where the overall shape of the probe tip is a smooth curved surface, as opposed to the conventional fin-like skate configuration. The skate layer is the most mechanically wear-resistant layer in the structure, so abrasive processing of the probe tip leads to a probe skate defined by the skate layer. The resulting probes provide the advantage of increased contact pressure without the disadvantage of reduced lifetime.

公开(公告)号：US11054443B2

公开(公告)日：2021-07-06

申请号：US16362239

申请日：2019-03-22

Applicant: FormFactor, Inc.

Inventor： January Kister ,  Chun-Chih Wang

IPC: G01R1/067 ,  G01R3/00

Abstract: A skate on a tip of a probe for testing electrical devices is a reduced thickness probe tip contact. Such a skate can advantageously increase contact pressure, but it can also undesirably reduce probe lifetime due to rapid mechanical wear of the skate. Here multilayer skate probes are provided where the overall shape of the probe tip is a smooth curved surface, as opposed to the conventional fin-like skate configuration. The skate layer is the most mechanically wear-resistant layer in the structure, so abrasive processing of the probe tip leads to a probe skate defined by the skate layer. The resulting probes provide the advantage of increased contact pressure without the disadvantage of reduced lifetime.