公开(公告)号：US09293382B2

公开(公告)日：2016-03-22

申请号：US14522626

申请日：2014-10-24

Applicant: GLOBALFOUNDRIES INC.

Inventor： Norbert Arnold ,  Jin Liu ,  Brian W. Messenger ,  Oliver D. Patterson

IPC: H01L23/58 ,  H01L27/12 ,  G01R31/26 ,  H01L21/20 ,  H01L21/66 ,  H01L49/02 ,  H01L21/84 ,  H01L29/66 ,  H01L27/108 ,  H01L21/762

CPC classification number: H01L22/14 ,  H01L21/762 ,  H01L21/84 ,  H01L22/32 ,  H01L22/34 ,  H01L27/10861 ,  H01L27/10894 ,  H01L27/1203 ,  H01L28/40 ,  H01L28/60 ,  H01L29/66181

Abstract: A method including forming a first test structure and a second test structure in electrical contact with an inner buried plate and an outer buried plate, respectively, where the first and second test structures each comprise a deep trench filled with a conductive material, and measuring the voltage of the inner buried plate and the outer buried plate immediately after the formation of a deep trench isolation structure, where the inner buried plate and the outer buried plate are positioned on opposite sides of the deep trench isolation structure.