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公开(公告)号：US20180016699A1
公开(公告)日：2018-01-18
申请号：US15708281
申请日：2017-09-19
Applicant: GLOBALFOUNDRIES INC.
Inventor： Charles L. Arvin , Glen N. Biggs , Phillip W. Palmatier , Joseph C. Sorbello , Tracy A. Tong , Freddie Torres
Abstract: Electroplating techniques including an electroplating system and a method for using the electroplating system are provided. The electroplating system has: an electroplating apparatus for electroplating a workpiece, the electroplating apparatus has an electroplating tank configured to contain a solution including target organics; a first reservoir configured to receive the solution including the target organics from the electroplating tank, and to hold the solution including the target organics; a foaming mechanism configured to, in the first reservoir, separate the target organics from the solution through foaming action such that the solution with a reduced concentration of the target organics is separated from a foam including the separated target organics; and a diverting mechanism configured to selectively feed the solution with the reduced concentration of the target organics to one of the first reservoir and the electroplating tank of the electroplating apparatus.
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公开(公告)号：US10053794B2
公开(公告)日：2018-08-21
申请号：US15708281
申请日：2017-09-19
Applicant: GLOBALFOUNDRIES INC.
Inventor： Charles L. Arvin , Glen N. Biggs , Phillip W. Palmatier , Joseph C. Sorbello , Tracy A. Tong , Freddie Torres
Abstract: Electroplating techniques including an electroplating system and a method for using the electroplating system are provided. The electroplating system has: an electroplating apparatus for electroplating a workpiece, the electroplating apparatus has an electroplating tank configured to contain a solution including target organics; a first reservoir configured to receive the solution including the target organics from the electroplating tank, and to hold the solution including the target organics; a foaming mechanism configured to, in the first reservoir, separate the target organics from the solution through foaming action such that the solution with a reduced concentration of the target organics is separated from a foam including the separated target organics; and a diverting mechanism configured to selectively feed the solution with the reduced concentration of the target organics to one of the first reservoir and the electroplating tank of the electroplating apparatus.
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公开(公告)号：US09777388B2
公开(公告)日：2017-10-03
申请号：US14522809
申请日：2014-10-24
Applicant: GLOBALFOUNDRIES INC.
Inventor： Charles L. Arvin , Glen N. Biggs , Phillip W. Palmatier , Joseph C. Sorbello , Tracy A. Tong , Freddie Torres
Abstract: Electroplating techniques including an electroplating system and a method for using the electroplating system are provided. The electroplating system has: an electroplating apparatus for electroplating a workpiece, the electroplating apparatus has an electroplating tank configured to contain a solution including target organics; a first reservoir configured to receive the solution including the target organics from the electroplating tank, and to hold the solution including the target organics; a foaming mechanism configured to, in the first reservoir, separate the target organics from the solution through foaming action such that the solution with a reduced concentration of the target organics is separated from a foam including the separated target organics; and a diverting mechanism configured to selectively feed the solution with the reduced concentration of the target organics to one of the first reservoir and the electroplating tank of the electroplating apparatus.
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