Backside spacer structures for improved thermal performance

    公开(公告)号:US10153224B2

    公开(公告)日:2018-12-11

    申请号:US15264957

    申请日:2016-09-14

    Abstract: Methods for reducing the junction temperature between an IC chip and its lid by including metal spacers in the TIM layer and the resulting devices are disclosed. Embodiments include providing a substrate, including integrated circuit devices, having front and back sides; forming vertical spacers on the backside of the substrate; providing a plate parallel to and spaced from the backside of the substrate; and forming a TIM layer, surrounding the vertical spacers, between the backside of the substrate and the plate.

Patent Agency Ranking