公开(公告)号：US20150162180A1

公开(公告)日：2015-06-11

申请号：US14100610

申请日：2013-12-09

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Gero Grau ,  Steffen Kalisch ,  Joerg Weigang ,  William John Fosnight ,  Chinmay Oza ,  Detlef Pabst

IPC: H01L21/02

CPC classification number: H01L21/02 ,  G05B17/02 ,  G05B19/0426 ,  G05B19/41875 ,  G05B2219/23006 ,  H01L21/67727 ,  Y02P90/20 ,  Y02P90/22 ,  Y02P90/86

Abstract: A method includes processing each of a plurality of lots with at least one first equipment and moving some of the plurality of lots to a first storage. For each of a plurality of second equipments, an expected dispatch time of one or more next lots for processing by the second equipment is determined Each of the lots in the first storage is assigned to one of the plurality of second equipments on the basis of at least the determined expected dispatch times and moved to one of a plurality of second storages that is associated with one of the plurality of second equipments to which the respective lot was assigned. For each of the plurality of second equipments, each of the lots in the second storage associated with the second equipment is moved to the second equipment and are processed with the second equipment.

Abstract translation: 一种方法包括利用至少一个第一设备来处理多个批次中的每一个，并且将多个批次中的一些移动到第一存储器。 对于多个第二设备中的每一个，确定由第二设备处理的一个或多个下一批次的预期调度时间被确定基于在第一设备中的第一设备中的一个批次被分配给多个第二设备中的一个 至少所确定的预期分配时间并移动到与分配了相应批次的多个第二设备中的一个相关联的多个第二存储器之一。 对于多个第二设备中的每一个，与第二设备相关联的第二存储器中的批次中的每一个被移动到第二设备并且用第二设备进行处理。

公开(公告)号：US09748088B2

公开(公告)日：2017-08-29

申请号：US14100610

申请日：2013-12-09

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Gero Grau ,  Steffen Kalisch ,  Joerg Weigang ,  William John Fosnight ,  Chinmay Oza ,  Detlef Pabst

IPC: H01L21/02 ,  H01L21/677 ,  G05B17/02 ,  G05B19/042 ,  G05B19/418

CPC classification number: H01L21/02 ,  G05B17/02 ,  G05B19/0426 ,  G05B19/41875 ,  G05B2219/23006 ,  H01L21/67727 ,  Y02P90/20 ,  Y02P90/22 ,  Y02P90/86

Abstract: A method includes processing each of a plurality of lots with at least one first equipment and moving some of the plurality of lots to a first storage. For each of a plurality of second equipments, an expected dispatch time of one or more next lots for processing by the second equipment is determined. Each of the lots in the first storage is assigned to one of the plurality of second equipments on the basis of at least the determined expected dispatch times and moved to one of a plurality of second storages that is associated with one of the plurality of second equipments to which the respective lot was assigned. For each of the plurality of second equipments, each of the lots in the second storage associated with the second equipment is moved to the second equipment and are processed with the second equipment.