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    Transport Vehicle
    2.
    发明公开
    Transport Vehicle 审中-公开

    公开(公告)号：US20240339346A1

    公开(公告)日：2024-10-10

    申请号：US18628204

    申请日：2024-04-05

    申请人： Daifuku Co., Ltd.

    发明人： Yoshinari Wada

    IPC分类号： H01L21/677 ,  B66C19/00

    CPC分类号： H01L21/67724 ,  B66C19/00 ,  H01L21/67733 ,  H01L21/67727 ,  H01L21/6773

    摘要： A transport vehicle includes a holder and a lifter. The lifter includes an elongated member and a lifting unit. The holder includes a support, at least one first holder member, at least one second holder member, and a holder drive. The first holder member and the second holder member are located below the support. The holder drive is located in a space in a vertical direction below the support. The space includes the first holder member and the second holder member. The elongated member fastener fastening an elongated member to the support is located on the support. The elongated member fastener protrudes downward from the support.

    Transport system
    3.
    发明授权
    Transport system 有权

    公开(公告)号：US12111636B2

    公开(公告)日：2024-10-08

    申请号：US17505975

    申请日：2021-10-20

    申请人： Daifuku Co., Ltd.

    发明人： Koichi Hagiwara ,  Makoto Kono

    IPC分类号： G05B19/418 ,  B65G1/04 ,  B65G43/08 ,  H01L21/67 ,  H01L21/677 ,  B65G1/137

    CPC分类号： G05B19/418 ,  B65G1/0492 ,  B65G43/08 ,  G05B19/4189 ,  H01L21/67276 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/6773 ,  B65G1/1375

    摘要： In a case where the target article is transported between areas, a management control unit executes path setting control, a first area control unit executes first area transport control, a connection control unit executes connecting transport control, and a second area control unit executes second area transport control. With the path setting control, an overall path from a departure point to a destination point is set on the basis of transportation status information of a first area transport facility, a second area transport facility, and a plurality of connecting transport facilities. With the second area transport control, a partial path from a second transfer position of a target connecting transport facility to the destination point is set on the basis of transportation status information of the second area transport facility.

    CONVEYANCE METHOD AND PROCESSING SYSTEM
    7.
    发明公开
    CONVEYANCE METHOD AND PROCESSING SYSTEM 审中-公开

    公开(公告)号：US20230411194A1

    公开(公告)日：2023-12-21

    申请号：US18027886

    申请日：2021-09-10

    申请人： TOKYO ELECTRON LIMITED

    发明人： Wataru NAKAGOMI ,  Shotaro MURAKAWA ,  Naoyuki SATO ,  Fumitaka SENTO ,  Tatsuya MUKOYAMA ,  Shigeru KUBOTA ,  Keisuke HIRAIDE

    IPC分类号： H01L21/677 ,  G05B19/4155

    CPC分类号： H01L21/67727 ,  G05B2219/39106 ,  G05B19/4155

    摘要： This method is for conveying, in a processing system comprising at least one processing unit that performs a desired process on substrates and a conveyance unit that conveys the substrates to the processing unit, a plurality of substrates, which are to be continuously processed, from the conveyance unit to the processing unit. To each of the substrates, an adjustment value for optionally changing processing time is assigned in advance. The method comprises: a step for acquiring an adjustment value allocated to a first substrate to be processed this time; a step for acquiring a reference adjustment value allocated to a reference substrate processed before the first substrate; a step for acquiring an actual time which is an actual time of processing performed on the reference substrate; a step for calculating a predictive processing time for the first substrate by reflecting, on the actual time, a difference between the adjustment value allocated to the first substrate and the reference adjustment time; and a step for adjusting, on the basis of the calculated predictive processing time, a conveyance timing of a second substrate to be processed after the first substrate.

    INTER-FLOOR TRANSPORT APPARATUS AND LOGISTICS TRANSPORT SYSTEM INCLUDING THE SAME
    8.
    发明公开
    INTER-FLOOR TRANSPORT APPARATUS AND LOGISTICS TRANSPORT SYSTEM INCLUDING THE SAME 审中-公开

    公开(公告)号：US20230207363A1

    公开(公告)日：2023-06-29

    申请号：US18080743

    申请日：2022-12-14

    申请人： SEMES CO., LTD.

    发明人： Eun Sang Yoon ,  Seung Keun Jun ,  Hyi Jae Kang

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67727

    摘要： An inter-floor transport apparatus and a logistics transport system including the inter-floor transport apparatus are provided. The logistics transport system includes: a stage module installed in space where semiconductor devices are fabricated, the stage module including a plurality of stages, which are installed on different floors; a frame module installed to have a direction intersecting the plurality of stages as a length direction; and an inter-floor transport apparatus moving along the frame module and transporting conveyed articles to each of the stages, wherein the inter-floor transport apparatus includes a first load unit, which transports the conveyed articles, a second load unit, which is disposed below the first load unit and transports the conveyed articles, a driving unit, which moves the first and second load units, and a control unit, which controls an operation of the driving unit, and transports a plurality of conveyed articles at the same time.

    Container transport facility
    9.
    发明授权
    Container transport facility 有权

    公开(公告)号：US10056281B2

    公开(公告)日：2018-08-21

    申请号：US15353036

    申请日：2016-11-16

    申请人： Daifuku Co., Ltd.

    发明人： Daisuke Ogawa ,  Akihiro Iwanaga ,  Ayato Takada

    IPC分类号： H01L21/67 ,  H01L21/677 ,  H01L21/673

    CPC分类号： H01L21/67733 ,  B65G2201/0297 ,  H01L21/67393 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67769 ,  H01L21/67775

    摘要： A transport apparatus transports a container that includes a flow hole forming portion in which a flow hole through which gas can flow between the outside and the inside of the container is formed. A connecting portion that has a flow path through which gas can flow and a filling gas supply source that allows a filling gas to flow through the flow path are provided in the transport apparatus. The connecting portion is configured to be switchable between a non-connected state in which the connecting portion is retracted to the outside of a moving region of the container that moves along a transport path and a connected state in which the connecting portion enters the inside of the moving region and is connected to the flow hole forming portion of the container.