公开(公告)号：US10121893B2

公开(公告)日：2018-11-06

申请号：US15797634

申请日：2017-10-30

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Hui Zang ,  Manfred J Eller ,  Min-Hwa Chi ,  Jerome J. B. Ciavatti

IPC: H01L29/66 ,  H01L29/423 ,  H01L29/78 ,  H01L27/088 ,  H01L29/417 ,  H01L29/49 ,  H01L27/11

Abstract: One aspect of the disclosure relates to an integrated circuit structure. The integrated circuit structure may include: a gate structure between a pair of gate spacers within a dielectric layer and substantially surrounding a fin, wherein the gate structure is disposed adjacent to a channel region within the fin; and a source/drain contact extending within the dielectric layer to a source/drain region within a fin, the source/drain contact being separated from the gate structure by at least one gate spacer in the pair of gate spacers, wherein the channel region and the source/drain region provide electrical connection between the gate structure and the source/drain contact.

公开(公告)号：US09842927B1

公开(公告)日：2017-12-12

申请号：US15248367

申请日：2016-08-26

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Hui Zang ,  Manfred J Eller ,  Min-Hwa Chi ,  Jerome J. B. Ciavatti

IPC: H01L29/49 ,  H01L29/43 ,  H01L27/092 ,  H01L21/28 ,  H01L29/78 ,  H01L29/66 ,  H01L29/417

CPC classification number: H01L29/783 ,  H01L27/1104 ,  H01L29/41775 ,  H01L29/4975 ,  H01L29/66545 ,  H01L29/66795

Abstract: One aspect of the disclosure relates to an integrated circuit structure. The integrated circuit structure may include: a gate structure between a pair of gate spacers within a dielectric layer and substantially surrounding a fin, wherein the gate structure is disposed adjacent to a channel region within the fin; and a source/drain contact extending within the dielectric layer to a source/drain region within a fin, the source/drain contact being separated from the gate structure by at least one gate spacer in the pair of gate spacers, wherein the channel region and the source/drain region provide electrical connection between the gate structure and the source/drain contact.