公开(公告)号：US20220413232A1

公开(公告)日：2022-12-29

申请号：US17362154

申请日：2021-06-29

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Spencer Porter ,  Mark Levy ,  Siva P. Adusumilli ,  Yusheng Bian

IPC: G02B6/42

Abstract: Structures for a coupler and methods of forming a structure for a coupler. A structure for a directional coupler may include a first waveguide core having one or more first airgaps and a second waveguide core including one or more second airgaps. The one or more second airgaps are positioned in the second waveguide core adjacent to the one or more first airgaps in the first waveguide core. A structure for an edge coupler is also provided in which the waveguide core of the edge coupler includes one or more airgaps.

公开(公告)号：US11768337B2

公开(公告)日：2023-09-26

申请号：US17362154

申请日：2021-06-29

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Spencer Porter ,  Mark Levy ,  Siva P. Adusumilli ,  Yusheng Bian

IPC: G02B6/42 ,  G02B6/122 ,  G02B6/12

CPC classification number: G02B6/4203 ,  G02B6/1225 ,  G02B2006/12104 ,  G02B2006/12159

Abstract: Structures for a coupler and methods of forming a structure for a coupler. A structure for a directional coupler may include a first waveguide core having one or more first airgaps and a second waveguide core including one or more second airgaps. The one or more second airgaps are positioned in the second waveguide core adjacent to the one or more first airgaps in the first waveguide core. A structure for an edge coupler is also provided in which the waveguide core of the edge coupler includes one or more airgaps.