公开(公告)号：US20230187892A1

公开(公告)日：2023-06-15

申请号：US18163689

申请日：2023-02-02

Applicant: Gigaphoton Inc.

Inventor： Yusuke SAITO ,  Masanori YASHIRO ,  Hiroshi FURUSATO ,  Yosuke WATANABE ,  Tokinori TERAO

IPC: H01S3/08 ,  H01S3/034 ,  H01S3/105 ,  G03F7/20

CPC classification number: H01S3/08009 ,  H01S3/034 ,  H01S3/105 ,  G03F7/70025

Abstract: A line narrowing gas laser device includes a line narrowing device, an output coupling mirror, a laser chamber arranged on an optical path of an optical resonator, a first holder which supports the output coupling mirror, a second holder which supports the first holder to be rotatable about a rotation axis of the first holder, and an adjustment device supported by the second holder and being in contact with the first holder to rotate the first holder about the rotation axis. The line narrowing device has a characteristic of changing, into a first direction, beam pointing of laser light output toward the output coupling mirror when temperature inside the line narrowing device rises. The second holder and the adjustment device rotate the first holder in a direction in which a change in the first direction in the beam pointing of the laser light is suppressed by thermal expansion.