公开(公告)号：US20240218557A1

公开(公告)日：2024-07-04

申请号：US18396266

申请日：2023-12-26

申请人： GlobalWafers Co., Ltd.

发明人： Carlo Zavattari ,  Michael Raffeiner ,  Paolo Delpero ,  Peter Albrecht ,  Fabrizio Bonda ,  Massimo Gariddi ,  Patrizio Pregnolato ,  Pietro Valcozzena ,  Maria Porrini

IPC分类号： C30B15/24 ,  C30B29/06 ,  C30B33/00

CPC分类号： C30B15/24 ,  C30B29/06 ,  C30B33/00

摘要： Methods for producing an off-orientation single crystal silicon wafer are disclosed. After a single crystal silicon ingot is grown, the single crystal silicon ingot is ground to increase an off-orientation of the single crystal silicon ingot. A wafer is sliced from ground single crystal silicon ingot. The wafer has an off-orientation greater than the ground single crystal silicon ingot.