公开(公告)号：US11175221B2

公开(公告)日：2021-11-16

申请号：US16980806

申请日：2019-03-14

Applicant: HORIBA FRANCE SAS

Inventor： Olivier Acher ,  Alexander Podzorov ,  Thanh-Liem Nguyen ,  Brice Villier ,  Géraldine Melizzi ,  Jean-Paul Gaston

IPC: G01N21/21 ,  G02B5/30 ,  G02B27/10

Abstract: Disclosed is an ellipsometer or scatterometer including a light source, a polarizer, an optical illumination system suitable for directing an incident polarized light beam towards a sample, a wavefront-division optical beam splitter arranged to receive a secondary light beam produced by reflection, transmission or diffraction, the wavefront-division optical beam splitter being oriented to form three collimated split beams, an optical polarization modification device and an optical polarization splitting device to form six angularly split beams, a detection system suitable for detecting the six split beams, and a processing system suitable for deducing therefrom an ellipsometric or scatterometric measurement.

公开(公告)号：US10565428B2

公开(公告)日：2020-02-18

申请号：US16301615

申请日：2017-05-15

Applicant: HORIBA FRANCE SAS

Inventor： Olivier Acher ,  Simon Richard ,  Melanie Gaillet ,  Alexander Podzorov ,  Adrian Knowles

IPC: G06K9/00 ,  G01Q30/04 ,  G01Q30/20 ,  H04N5/232

Abstract: Disclosed is a micro-localisation device defining a system of spatial coordinates for an imaging instrument. The micro-localisation device includes at least one first zone and a second zone, adjacent to each other, each zone extending spatially over an area of macroscopic size, each zone including an elementary cell or a tiling of a plurality of elementary cells extending over the respective area of the zone, each elementary cell of the first, respectively second, zone including an orientation pattern, a positioning pattern and a periodic spatial pattern, configured to be imaged by an imaging instrument and to determine a position and, respectively an orientation of the imaging instrument in the system of spatial coordinates of the micro-localisation device.