公开(公告)号：US3885877A

公开(公告)日：1975-05-27

申请号：US40534773

申请日：1973-10-11

Applicant: IBM

Inventor： HORWATH RONALD S ,  KOLB GEORGE A

IPC: H01L21/027 ,  G02B7/00 ,  G03F9/00 ,  H01L21/30 ,  H01L23/544 ,  G01B11/26

CPC classification number: G03F9/7076 ,  G03F9/00 ,  H01L23/544 ,  H01L2223/54453 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Consistent optical signals are produced for an electro-optical fine alignment system by the use of an overcoating. The overcoating is reflective at the alignment wave lengths so that the coating acts to present a new relief image to the alignment optics.

Abstract translation: 通过使用外涂层为电光学精细对准系统生产一致的光信号。 外涂层在对准波长处是反射的，使得涂层用于向对准光学器件呈现新的浮雕图像。