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公开(公告)号：US3303116A
公开(公告)日：1967-02-07
申请号：US40280064
申请日：1964-10-09
Applicant: IBM
Inventor： MAISSELL LEON I , FLUR BARRY L , BERTELSEN BRUCE I
CPC classification number: C23C14/35 , H01F41/18 , H01J37/3402
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