TUNABLE WAVEGUIDE GRATING WITH A HEATING LAYER

    公开(公告)号:US20220057581A1

    公开(公告)日:2022-02-24

    申请号:US17404173

    申请日:2021-08-17

    Applicant: IMEC vzw

    Abstract: An optical device including a waveguide grating is disclosed. The optical device may be used as an optical cavity for a laser device, for instance, of an integrated laser device for light detection and ranging (Lidar) applications. In one aspect, the optical device includes a waveguide grating for guiding light, a heating layer provided beneath or above the waveguide grating, and two or more contacts for passing a current through the heating layer, to generate heat in the heating layer. The heating layer is thermally coupled to the waveguide grating and is optically decoupled from the waveguide grating.

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