公开(公告)号：US20250164370A1

公开(公告)日：2025-05-22

申请号：US18900157

申请日：2024-09-27

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Meng-Shun HUANG ,  Ting-Ting CHANG ,  Wu-Yang SEAN ,  Yi-Hsien CHIANG ,  Jen-Chieh WU

IPC: G01N11/04 ,  G01N13/00

Abstract: Film evaluation system and evaluation method thereof are provided. The film evaluation system includes a measurement unit, an observation unit, an adaptive algorithm unit, an estimation unit, and a health state calculation unit. The measurement unit obtains an initial state parameter set corresponding to a film. The observation unit is connected to the measurement unit and obtains a flux observation value according to the initial state parameter set. The adaptive algorithm unit is connected to the observation unit and obtains a flux prediction value according to the initial state parameter set. The estimation unit is connected to the adaptive algorithm unit and obtains a diffusion rate and a flow resistance by comparing the flux observation value and the flux prediction value. The health state calculation unit is connected to the estimation unit and obtains a health state of the film according to the diffusion rate and the flow resistance.