摘要:
The discharge which occurs in an accelerating tube of an electron microscope is detected by a detector and a comparing circuit determines whether or not the value of the detected discharge is larger or smaller than a predetermined value at which a spark occurs to produce a high level signal or a low level signal, respectively. The d. c. high voltage applied to respective accelerating electrodes in the accelerating tube is decreased or increased in response to said high level signal or said low level signal so as to suppress any undesired large discharge in the tube, and thereby prevent sparking therein.