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公开(公告)号:US20170159196A1
公开(公告)日:2017-06-08
申请号:US15250945
申请日:2016-08-30
Applicant: Industrial Technology Research Institute
Inventor: Chun-Fu Lu , Ya-Ching Chou , Li-Wei Liu , Hsin-Hwa Chen
Abstract: An electrical deposition apparatus includes a brush plating head. The brush plating head includes a plurality of channels, and there are openings at the same surface of the brush plating head. Each of the channels extends from within the brush plating head to each of the openings.