公开(公告)号：US10655166B2

公开(公告)日：2020-05-19

申请号：US15727296

申请日：2017-10-06

Applicant: Intel Corporation

Inventor： Xing Su ,  Lei B. Sun ,  Jacque H. Georger, Jr.

IPC: C12Q1/6837 ,  B01J19/00 ,  B01L3/00 ,  B82Y15/00 ,  B82Y30/00 ,  G01N33/543 ,  C40B60/04

Abstract: Apparatus and methods are disclosed for electrically active combinatorial-chemical (EACC) chips for biochemical analyte detection. An apparatus includes a substrate that has an array of regions defining multiple cells, wherein each of the cells includes a reaction cavity that contains multiple functional binding groups. A method of detecting an analyte providing the reaction cavity between a source and a drain or a pair of electrodes, applying a voltage and monitoring a parameter indicative of an analyte characteristic. A process of fabricating an EACC include bonding an analyte to the multiple functional binding groups of each reaction cavity, and forming an analyte sensing structure including the substrate.