公开(公告)号：US10217729B2

公开(公告)日：2019-02-26

申请号：US15283102

申请日：2016-09-30

Applicant: Intel Corporation

Inventor： Khaled Ahmed ,  Kunjal ShyamKumar Parikh ,  Peter Chang

IPC: H01L25/13 ,  H01L25/075 ,  H01L21/683 ,  H01L23/00 ,  H01L25/00

Abstract: Embodiments of the invention include systems and methods for transferring micro LEDs. In an embodiment, the system for transferring micro LEDs, may include a donor substrate bank that is capable of supporting a plurality of donor substrates on which a plurality of micro LEDs are formed. In an embodiment, the donor substrate bank is moveable in the X, Y, and Z directions. In an embodiment, the system may also include a host substrate table that is capable of supporting a host substrate. The host substrate may include a plurality of segments. In an embodiment, the host substrate table is moveable in the X, Y, and Z directions. Embodiments of the invention may also include an array of macro transfer heads. In an embodiment, each macro transfer head may include a plurality of micro transfer heads.