公开(公告)号：US10163601B1

公开(公告)日：2018-12-25

申请号：US15856211

申请日：2017-12-28

Applicant: Intel Corporation

Inventor： Amir Raveh ,  Travis Eiles ,  Evgeny Gregory Nisenboim ,  Patrick Pardy

IPC: G01R31/305 ,  G01R31/306 ,  G01R31/302 ,  G01R31/311 ,  H01J37/073 ,  H01J37/06 ,  H01J37/244 ,  H01J37/14 ,  H01J37/28

Abstract: A probe assembly for analyzing a test device that includes a housing with an electron source disposed therein for emitting primary electrons. A photon source is positioned to emit photons that strike the electron source such that when the photons strike the electron source, the electron source emits the primary electrons. Detection circuitry is provided that is configured to detect secondary electrons emitted from a test device of a test assembly and to form an excitation waveform.