公开(公告)号：US6165918A

公开(公告)日：2000-12-26

申请号：US306654

申请日：1999-05-06

申请人： James Yingbo Jia ,  Jeong-Yeol Choi

发明人： James Yingbo Jia ,  Jeong-Yeol Choi

IPC分类号： H01L21/8234 ,  H01L21/8238

CPC分类号： H01L21/823462 ,  Y10S438/981

摘要： Systems and methods are described for fabricating semiconductor gate oxides of different thicknesses. Two methods for forming gate oxides of different thicknesses in conjunction with local oxidation of silicon (LOCOS) are disclosed. Similarly, two methods for forming gate oxides of different thicknesses in conjunction with shallow trench isolation (STI) are disclosed. Techniques that use two poly-silicon sub-layers of substantially equal thickness and techniques that use two poly-silicon sub-layers of substantially unequal thickness are described for both LOCOS and STI. The systems and methods provide advantages because gate uniformity and quality are improved, the processes and resulting devices are cleaner, and there is less degradation of carrier mobility.

摘要翻译： 描述了制造不同厚度的半导体栅极氧化物的系统和方法。 公开了两种形成不同厚度的栅氧化物结合局部氧化硅（LOCOS）的方法。 类似地，公开了与浅沟槽隔离（STI）结合形成不同厚度的栅极氧化物的两种方法。 对于LOCOS和STI都描述了使用基本相等厚度的两个多硅子层和使用基本上不等厚度的两个多晶硅子层的技术的技术。 系统和方法提供了优点，因为栅极均匀性和质量得到改善，工艺和所得到的器件更清洁，载体迁移率降低较少。

公开(公告)号：US07316537B2

公开(公告)日：2008-01-08

申请号：US11135398

申请日：2005-05-24

申请人： Joo-Jib Park ,  Jeong-Yeol Choi

发明人： Joo-Jib Park ,  Jeong-Yeol Choi

IPC分类号： B25J18/04

CPC分类号： H01L21/68707

摘要： A substrate transport apparatus is provided for stably transporting a substrate and sensing a receiving state of the substrate. The substrate transport apparatus includes a grip member for gripping a substrate placed on the pocket part of the hand when a hand returns to a groove position from a pickup position. The grip member may include a pusher and an elastic member. The pusher has a curved section contacting the edge of a substrate and is mounted on the base to move in the same direction as the at least one hand, and the elastic member supplies an elastic force for enabling the pusher to laterally press the edge of the substrate.

摘要翻译： 提供了用于稳定地输送基板并感测基板的接收状态的基板输送装置。 基板输送装置包括握持构件，用于当手从拾取位置返回到凹槽位置时，夹持放置在手的口袋部分上的基底。 夹持构件可以包括推动器和弹性构件。 推动器具有与基板的边缘接触的弯曲部分，并且安装在基座上以与至少一只手相同的方向移动，并且弹性构件提供弹性力，以使推动器能够横向按压 基质。

公开(公告)号：US20090108545A1

公开(公告)日：2009-04-30

申请号：US12091743

申请日：2006-10-26

申请人： Oh-Jin Kwon ,  Jeong-Yong Bae ,  Jeong-Yeol Choi

发明人： Oh-Jin Kwon ,  Jeong-Yong Bae ,  Jeong-Yeol Choi

IPC分类号： B23B31/12

CPC分类号： H01L21/6708 ,  H01L21/68728 ,  Y10T279/18

摘要： The present invention is directed to a spin chuck for use in a process, such as a cleaning process and an etching process, performed while rotating a substrate. The spin chuck includes a spin head on which a substrate is placed, a driving part configured to rotate the spin head, and a fix bracket installed on the spin head and having a contact surface that is in contact with a flat surface of a flat zone of the substrate at a position corresponding to the flat zone to prevent a vortex caused by the flat zone. Since the fix bracket has the same shape as the flat zone of the substrate, an air current unbalance resulting from the flat zone is suppressed to uniformly inject etchants to a rear surface of the substrate.

摘要翻译： 本发明涉及一种旋转卡盘，用于在旋转基板的同时执行诸如清洁处理和蚀刻工艺的工艺。 旋转卡盘包括其上放置基板的旋转头，构造成旋转旋转头的驱动部分和安装在旋转头上的固定支架，并且具有与平坦区域的平坦表面接触的接触表面 在对应于平坦区域的位置处的基板，以防止由平坦区域引起的涡流。 由于固定支架具有与基板的平坦区域相同的形状，所以抑制了从平坦区域产生的气流不平衡，以均匀地将蚀刻剂注入基板的后表面。

公开(公告)号：US20060037499A1

公开(公告)日：2006-02-23

申请号：US11135398

申请日：2005-05-24

申请人： Joo-Jib Park ,  Jeong-Yeol Choi

发明人： Joo-Jib Park ,  Jeong-Yeol Choi

IPC分类号： B41F17/00

CPC分类号： H01L21/68707

摘要： A substrate transport apparatus is provided for stably transporting a substrate and sensing a receiving state of the substrate. The substrate transport apparatus includes a grip member for gripping a substrate placed on the pocket part of the hand when a hand returns to a groove position from a pickup position. The grip member may include a pusher and an elastic member. The pusher has a curved section contacting the edge of a substrate and is mounted on the base to move in the same direction as the at least one hand, and the elastic member supplies an elastic force for enabling the pusher to laterally press the edge of the substrate.

摘要翻译： 提供了用于稳定地输送基板并感测基板的接收状态的基板输送装置。 基板输送装置包括握持构件，用于当手从拾取位置返回到凹槽位置时，夹持放置在手的口袋部分上的基底。 夹持构件可以包括推动器和弹性构件。 推动器具有与基板的边缘接触的弯曲部分，并且安装在基座上以与至少一只手相同的方向移动，并且弹性构件提供弹性力，以使推动器能够横向按压 基质。