Detection device
    1.
    发明授权

    公开(公告)号:US11874165B2

    公开(公告)日:2024-01-16

    申请号:US18195634

    申请日:2023-05-10

    CPC classification number: G01J1/44 G01J2001/446

    Abstract: According to an aspect, a detection device includes: a substrate; a photodiode in which a lower electrode, a semiconductor layer, and an upper electrode are stacked on the substrate in the order as listed; a transistor provided in the photodiode; and an insulating layer provided between layers of the transistor and the photodiode. The insulating layer has a contact hole provided in a central portion of the photodiode in plan view. The lower electrode of the photodiode is provided on the insulating layer, is provided continuously in an area overlapping the contact hole, and is electrically coupled to the transistor at a bottom of the contact hole. A first opening is provided in an area of the upper electrode that overlaps the contact hole.

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