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公开(公告)号:US20240097043A1
公开(公告)日:2024-03-21
申请号:US18456832
申请日:2023-08-28
Applicant: Japan Display Inc.
Inventor: Hajime WATAKABE , Masashi TSUBUKU , Toshinari SASAKI , Takay TAMARU
IPC: H01L29/786
CPC classification number: H01L29/7869 , H01L29/78696
Abstract: A semiconductor device according to an embodiment of the present invention includes an oxide insulating layer, an oxide semiconductor layer, a gate insulating layer, a gate electrode, and a protective insulating layer. The gate insulating layer includes a first region overlapping the gate electrode and a second region not overlapping the gate electrode. The second region is in contact with the protective insulating layer. The oxide insulating layer includes a third region overlapping the gate electrode and a fourth region not overlapping the gate electrode and the oxide semiconductor layer. The fourth region is in contact with the gate insulating layer. The oxide semiconductor layer includes a channel region, a source region, and a drain region. Each of the source region, the drain region, and the second region contains an impurity. A hydrogen concentration of the second region is greater than a hydrogen concentration of the first region.