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公开(公告)号：US08327727B2
公开(公告)日：2012-12-11
申请号：US12546777
申请日：2009-08-25
CPC分类号： G01R1/06716 , G01R1/06755 , G01R31/2863
摘要： To eliminate or otherwise reduce unintended movement of a probe tip of a probe assembly being held by a probe arm, the probe assembly includes one or more resilient members that compensate for the contraction or expansion of the probe arm in accordance with the coefficient of thermal expansion of the material from which the probe arm is made. Thus, the probe tip can remain in contact with a sample being measured at the desired location on the sample, during an automated full or wide scale temperature range sweep.
摘要翻译： 为了消除或以其他方式减少由探针臂保持的探针组件的探针尖端的意外移动，探针组件包括一个或多个弹性构件，其根据热膨胀系数补偿探针臂的收缩或膨胀 的探针臂的材料。 因此，在自动化全宽或大范围温度范围扫描期间，探针尖端可以保持与在样品上期望位置处被测量的样品接触。
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公开(公告)号：US20100064784A1
公开(公告)日：2010-03-18
申请号：US12546777
申请日：2009-08-25
IPC分类号： G01B5/28
CPC分类号： G01R1/06716 , G01R1/06755 , G01R31/2863
摘要： To eliminate or otherwise reduce unintended movement of a probe tip of a probe assembly being held by a probe arm, the probe assembly includes one or more resilient members that compensate for the contraction or expansion of the probe arm in accordance with the coefficient of thermal expansion of the material from which the probe arm is made. Thus, the probe tip can remain in contact with a sample being measured at the desired location on the sample, during an automated full or wide scale temperature range sweep.
摘要翻译： 为了消除或以其他方式减少由探针臂保持的探针组件的探针尖端的意外移动，探针组件包括一个或多个弹性构件，其根据热膨胀系数补偿探针臂的收缩或膨胀 的探针臂的材料。 因此，在自动化全宽或大范围温度范围扫描期间，探针尖端可以保持与在样品上期望位置处被测量的样品接触。
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