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公开(公告)号:US08560106B2
公开(公告)日:2013-10-15
申请号:US13306646
申请日:2011-11-29
IPC分类号: G05B23/00
CPC分类号: G05B23/0283 , Y02P90/86
摘要: A server receives equipment data from third party support equipment during operation of the third party support equipment in a manufacturing environment. The server receives the equipment data via a first port on the third party support equipment. The third party support equipment communicates with a process tool via a second port on third party support equipment. The server determines a future state of the third party support equipment based on the equipment data and notifies a user of the future state of the third party support equipment.
摘要翻译: 在制造环境中的第三方支持设备的操作期间,服务器从第三方支持设备接收设备数据。 服务器通过第三方支持设备上的第一个端口接收设备数据。 第三方支持设备通过第三方支持设备上的第二个端口与进程工具进行通信。 服务器根据设备数据确定第三方支持设备的未来状态,并向用户通知第三方支持设备的未来状态。
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公开(公告)号:US20120191225A1
公开(公告)日:2012-07-26
申请号:US13306646
申请日:2011-11-29
IPC分类号: G05B13/02
CPC分类号: G05B23/0283 , Y02P90/86
摘要: A server receives equipment data from third party support equipment during operation of the third party support equipment in a manufacturing environment. The server receives the equipment data via a first port on the third party support equipment. The third party support equipment communicates with a process tool via a second port on third party support equipment. The server determines a future state of the third party support equipment based on the equipment data and notifies a user of the future state of the third party support equipment.
摘要翻译: 在制造环境中的第三方支持设备的操作期间,服务器从第三方支持设备接收设备数据。 服务器通过第三方支持设备上的第一个端口接收设备数据。 第三方支持设备通过第三方支持设备上的第二个端口与进程工具进行通信。 服务器根据设备数据确定第三方支持设备的未来状态,并向用户通知第三方支持设备的未来状态。
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公开(公告)号:US06965895B2
公开(公告)日:2005-11-15
申请号:US10194920
申请日:2002-07-12
申请人: Shawn B. Smith , Brian P. Grigsby , Hung J. Pham , Tony L. Davis , Manjunath S. Yedatore , William R. Clements, III
发明人: Shawn B. Smith , Brian P. Grigsby , Hung J. Pham , Tony L. Davis , Manjunath S. Yedatore , William R. Clements, III
CPC分类号: G06Q10/06 , G06F17/30442 , G06F17/30539 , G06F17/30563 , G06F17/30592 , Y10S707/99935 , Y10S707/99936 , Y10S707/99942 , Y10S707/99945
摘要: A method for data mining information obtained in an integrated circuit fabrication factory (“fab”) that includes steps of: (a) gathering data from the fab from one or more of systems, tools, and databases that produce data in the fab or collect data from the fab; (b) formatting the data and storing the formatted data in a source database; (c) extracting portions of the data for use in data mining in accordance with a user specified configuration file; (d) data mining the extracted portions of data in response to a user specified analysis configuration file; (e) storing results of data mining in a results database; and (f) providing access to the results.
摘要翻译: 一种在集成电路制造工厂(“fab”)中获得的用于数据挖掘信息的方法,其包括以下步骤:(a)从在晶圆厂中产生数据的一个或多个系统,工具和数据库收集来自晶圆厂的数据,或收集 晶圆厂的数据; (b)格式化数据并将格式化的数据存储在源数据库中; (c)根据用户指定的配置文件提取用于数据挖掘的数据的部分; (d)响应于用户指定的分析配置文件数据挖掘提取的数据部分; (e)将数据挖掘的结果存储在结果数据库中; 和(f)提供对结果的访问。
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