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公开(公告)号:US06965895B2
公开(公告)日:2005-11-15
申请号:US10194920
申请日:2002-07-12
申请人: Shawn B. Smith , Brian P. Grigsby , Hung J. Pham , Tony L. Davis , Manjunath S. Yedatore , William R. Clements, III
发明人: Shawn B. Smith , Brian P. Grigsby , Hung J. Pham , Tony L. Davis , Manjunath S. Yedatore , William R. Clements, III
CPC分类号: G06Q10/06 , G06F17/30442 , G06F17/30539 , G06F17/30563 , G06F17/30592 , Y10S707/99935 , Y10S707/99936 , Y10S707/99942 , Y10S707/99945
摘要: A method for data mining information obtained in an integrated circuit fabrication factory (“fab”) that includes steps of: (a) gathering data from the fab from one or more of systems, tools, and databases that produce data in the fab or collect data from the fab; (b) formatting the data and storing the formatted data in a source database; (c) extracting portions of the data for use in data mining in accordance with a user specified configuration file; (d) data mining the extracted portions of data in response to a user specified analysis configuration file; (e) storing results of data mining in a results database; and (f) providing access to the results.
摘要翻译: 一种在集成电路制造工厂(“fab”)中获得的用于数据挖掘信息的方法,其包括以下步骤:(a)从在晶圆厂中产生数据的一个或多个系统,工具和数据库收集来自晶圆厂的数据,或收集 晶圆厂的数据; (b)格式化数据并将格式化的数据存储在源数据库中; (c)根据用户指定的配置文件提取用于数据挖掘的数据的部分; (d)响应于用户指定的分析配置文件数据挖掘提取的数据部分; (e)将数据挖掘的结果存储在结果数据库中; 和(f)提供对结果的访问。
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公开(公告)号:US08010321B2
公开(公告)日:2011-08-30
申请号:US11800460
申请日:2007-05-04
CPC分类号: G05B19/0428 , G05B2219/37519
摘要: A method and apparatus for diagnosing faults. Process data is analyzed using a first metric to identify a fault. The process data was obtained from a manufacturing machine running a first recipe. A fault signature that matches the fault is identified. The identified fault signature was generated using a second metric and/or a second recipe. At least one fault class that is associated with the fault signature is identified.
摘要翻译: 一种用于诊断故障的方法和装置。 使用第一个度量来分析过程数据以识别故障。 过程数据是从运行第一配方的制造机器获得的。 识别与故障匹配的故障签名。 使用第二度量和/或第二配方生成所识别的故障签名。 识别与故障签名相关联的至少一个故障类。
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