公开(公告)号：US11592342B2

公开(公告)日：2023-02-28

申请号：US16823705

申请日：2020-03-19

Applicant: KCTECH CO., LTD.

Inventor： Jae Won Lee ,  Ju Young Lee ,  Kyung Cheol Jeong ,  Jun Ho Lee ,  Yong Guk Park

IPC: G01K13/02 ,  G01K1/14 ,  G01K1/143

Abstract: Disclosed is a temperature detection device. The device for detecting temperature of a processing liquid for substrate processing according to an embodiment includes a temperature measurement sensor installed adjacent to an outer surface of a tube through which the processing liquid flows, in which the temperature measurement sensor senses the temperature of the processing liquid in the tube.