公开(公告)号：US09891356B1

公开(公告)日：2018-02-13

申请号：US14847875

申请日：2015-09-08

Applicant: KLA-Tencor Corporation

Inventor： Joseph Walsh ,  Frank Barkusky ,  Eduardo Soto ,  Sarbjit Singh Grewal ,  Orlando Threet ,  Gildardo Rios Delgado ,  Garry Allen Rose

IPC: G02B5/20 ,  G03F7/20 ,  G02B7/00

CPC classification number: G02B5/203 ,  G02B5/208 ,  G02B7/006 ,  G03F7/70191 ,  G03F7/708

Abstract: A device includes spectral purity filters (SPF) and structures for supporting SPF films. The device further includes a monolithic support having a mesh portion and a frame portion and a film overlaying at least a portion of the support. In some cases, the film can be affixed to the support without an adhesive. The monolithic support can be Silicon, stainless steel or some other suitable material and the film can be a single layer spectral purity filter film or a multilayer spectral purity filter film. The mesh portion of the support can include a plurality of through-holes that are formed by etching and/or eroding a thinned material such as silicon or stainless steel.