公开(公告)号：US20130270444A1

公开(公告)日：2013-10-17

申请号：US13862148

申请日：2013-04-12

Applicant: KLA-TENCOR CORPORATION

Inventor： Pradeep Subrahmanyan ,  Daniel Wack ,  Michael Wright ,  David Alles

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/956 ,  G01N2021/95676

Abstract: A method for synchronizing sample stage motion with a time delay integration (TDI) charge-couple device (CCD) in a semiconductor inspection tool, including: measuring a lateral position of a stage holding a sample being inspected; measuring a vertical position of the stage; determining a corrected lateral position of an imaged pixel of the sample based on the measured lateral and vertical positions; and synchronizing charge transfer of the TDI CCD with the corrected lateral position of the imaged pixel.

Abstract translation: 一种用于在半导体检测工具中使样本台运动与时间延迟积分（TDI）电荷耦合器件（CCD）同步的方法，包括：测量保持被检样品的台的横向位置; 测量舞台的垂直位置; 基于所测量的横向和垂直位置确定样本的成像像素的校正横向位置; 以及使所述TDI CCD的电荷转移与被成像像素的校正横向位置同步。

公开(公告)号：US08772731B2

公开(公告)日：2014-07-08

申请号：US13862148

申请日：2013-04-12

Applicant: KLA-Tencor Corporation

Inventor： Pradeep Subrahmanyan ,  Daniel Wack ,  Michael Wright ,  David Alles

IPC: G01J1/42

CPC classification number: G01N21/9501 ,  G01N21/956 ,  G01N2021/95676

Abstract: A method for synchronizing sample stage motion with a time delay integration (TDI) charge-couple device (CCD) in a semiconductor inspection tool, including: measuring a lateral position of a stage holding a sample being inspected; measuring a vertical position of the stage; determining a corrected lateral position of an imaged pixel of the sample based on the measured lateral and vertical positions; and synchronizing charge transfer of the TDI CCD with the corrected lateral position of the imaged pixel.

Abstract translation: 一种用于在半导体检测工具中使样本台运动与时间延迟积分（TDI）电荷耦合器件（CCD）同步的方法，包括：测量保持被检样品的台的横向位置; 测量舞台的垂直位置; 基于所测量的横向和垂直位置确定样本的成像像素的校正横向位置; 以及使所述TDI CCD的电荷转移与被成像像素的校正横向位置同步。