公开(公告)号：US09772289B2

公开(公告)日：2017-09-26

申请号：US15167721

申请日：2016-05-27

Applicant: KLA-Tencor Corporation

Inventor： Romain Sappey

IPC: G01N21/64 ,  G01N21/95 ,  G01N21/88

CPC classification number: G01N21/6489 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/6495 ,  G01N2021/8845 ,  G01N2201/06113 ,  G01N2201/0662

Abstract: Defect detection and photoluminescence measurement of a sample directing a beam of oblique-illumination wavelength light onto a portion of the sample, directing a beam of normal-illumination wavelength light for causing one or more photoluminescing defects of the sample to emit photoluminescent light onto a portion of the sample, collecting defect scattered radiation or photoluminescence radiation from the sample, separating the radiation from the sample into a first portion of radiation in the visible spectrum, a second portion of radiation including the normal-illumination wavelength light, and at least a third portion of radiation including the oblique-illumination wavelength light, measuring one or more characteristics of the first portion, the second portion or the third portion of radiation; detecting one or more photoluminescence defects or one or more scattering defects based on the measured one or more characteristics of the first portion, the second portion or the third portion of radiation.

公开(公告)号：US09354177B2

公开(公告)日：2016-05-31

申请号：US14212496

申请日：2014-03-14

Applicant: KLA-Tencor Corporation

Inventor： Romain Sappey

IPC: G01N21/64 ,  G01N21/88

CPC classification number: G01N21/6489 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/6495 ,  G01N2021/8845 ,  G01N2201/06113 ,  G01N2201/0662

Abstract: Defect detection and photoluminescence measurement of a sample directing a beam of oblique-illumination wavelength light onto a portion of the sample, directing a beam of normal-illumination wavelength light for causing one or more photoluminescing defects of the sample to emit photoluminescent light onto a portion of the sample, collecting defect scattered radiation or photoluminescence radiation from the sample, separating the radiation from the sample into a first portion of radiation in the visible spectrum, a second portion of radiation including the normal-illumination wavelength light, and at least a third portion of radiation including the oblique-illumination wavelength light, measuring one or more characteristics of the first portion, the second portion or the third portion of radiation; detecting one or more photoluminescence defects or one or more scattering defects based on the measured one or more characteristics of the first portion, the second portion or the third portion of radiation.

Abstract translation: 样品的缺陷检测和光致发光测量将倾斜照明波长的光束引导到样品的一部分上，引导正常照明波长的光束，以使样品的一个或多个光致发光缺陷发射光致发光光到一部分上 收集来自样品的缺陷散射辐射或光致发光辐射，将来自样品的辐射分离成可见光谱中的辐射的第一部分，包括正常照明波长的光的第二部分辐射，以及至少三分之一 测量包括倾斜照明波长光的辐射部分，测量第一部分，第二部分或第三部分辐射的一个或多个特性; 基于所测量的第一部分，第二部分或第三部分辐射的一个或多个特性来检测一个或多个光致发光缺陷或一个或多个散射缺陷。

公开(公告)号：US20160377548A1

公开(公告)日：2016-12-29

申请号：US15167721

申请日：2016-05-27

Applicant: KLA-Tencor Corporation

Inventor： Romain Sappey

IPC: G01N21/64 ,  G01N21/95 ,  G01N21/88

CPC classification number: G01N21/6489 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/6495 ,  G01N2021/8845 ,  G01N2201/06113 ,  G01N2201/0662

Abstract: Defect detection and photoluminescence measurement of a sample directing a beam of oblique-illumination wavelength light onto a portion of the sample, directing a beam of normal-illumination wavelength light for causing one or more photoluminescing defects of the sample to emit photoluminescent light onto a portion of the sample, collecting defect scattered radiation or photoluminescence radiation from the sample, separating the radiation from the sample into a first portion of radiation in the visible spectrum, a second portion of radiation including the normal-illumination wavelength light, and at least a third portion of radiation including the oblique-illumination wavelength light, measuring one or more characteristics of the first portion, the second portion or the third portion of radiation; detecting one or more photoluminescence defects or one or more scattering defects based on the measured one or more characteristics of the first portion, the second portion or the third portion of radiation.

公开(公告)号：US09410890B2

公开(公告)日：2016-08-09

申请号：US13796948

申请日：2013-03-12

Applicant: KLA-Tencor Corporation

Inventor： Romain Sappey

IPC: G01N21/00 ,  G01N21/64 ,  G01B11/06 ,  G01N21/66

CPC classification number: G01N21/6489 ,  G01B11/06 ,  G01N21/66

Abstract: One embodiment relates to a computer-implemented method of processing spectral luminescence mapping data obtained from a substrate, the substrate having an epitaxial layer stack that includes a multiple quantum well. A spectral luminescence and an epi thickness at a location on the substrate are obtained. A spectral modulation for the location may be computed given the epi thickness and material indices of refraction. The underlying luminescence spectrum may then be generated by dividing the measured spectral luminescence by the spectral modulation. Subsequently, a peak wavelength and other parameters may be obtained from the underlying luminescence spectrum. In another embodiment, the underlying luminescence spectrum may be determined, without the epi thickness measurement, using a self-consistent technique. Another embodiment relates to an apparatus for spectral luminescence mapping and epitaxial thickness measurement. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及一种处理从衬底获得的光谱发光映射数据的计算机实现的方法，该衬底具有包括多量子阱的外延层堆叠。 获得在基板上的位置处的光谱发光和外延厚度。 给定的epi厚度和材料折射率可以计算该位置的光谱调制。 然后可以通过将测量的光谱发光除以光谱调制而产生潜在的发光光谱。 随后，可以从潜在的发光光谱获得峰值波长和其它参数。 在另一个实施例中，可以使用自相一致的技术来确定潜在的发光光谱，而不用外延厚度测量。 另一实施例涉及用于光谱发光映射和外延厚度测量的装置。 还公开了其它实施例，方面和特征。

公开(公告)号：US20150001421A1

公开(公告)日：2015-01-01

申请号：US14212496

申请日：2014-03-14

Applicant: KLA-Tencor Corporation

Inventor： Romain Sappey

IPC: G01N21/64 ,  G01N21/88

CPC classification number: G01N21/6489 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/6495 ,  G01N2021/8845 ,  G01N2201/06113 ,  G01N2201/0662

Abstract: Defect detection and photoluminescence measurement of a sample directing a beam of oblique-illumination wavelength light onto a portion of the sample, directing a beam of normal-illumination wavelength light for causing one or more photoluminescing defects of the sample to emit photoluminescent light onto a portion of the sample, collecting defect scattered radiation or photoluminescence radiation from the sample, separating the radiation from the sample into a first portion of radiation in the visible spectrum, a second portion of radiation including the normal-illumination wavelength light, and at least a third portion of radiation including the oblique-illumination wavelength light, measuring one or more characteristics of the first portion, the second portion or the third portion of radiation; detecting one or more photoluminescence defects or one or more scattering defects based on the measured one or more characteristics of the first portion, the second portion or the third portion of radiation.

Abstract translation: 样品的缺陷检测和光致发光测量将倾斜照明波长的光束引导到样品的一部分上，引导正常照明波长的光束，以使样品的一个或多个光致发光缺陷发射光致发光光到一部分上 收集来自样品的缺陷散射辐射或光致发光辐射，将来自样品的辐射分离成可见光谱中的辐射的第一部分，包括正常照明波长的光的第二部分辐射，以及至少三分之一 测量包括倾斜照明波长光的辐射部分，测量第一部分，第二部分或第三部分辐射的一个或多个特性; 基于所测量的第一部分，第二部分或第三部分辐射的一个或多个特性来检测一个或多个光致发光缺陷或一个或多个散射缺陷。