公开(公告)号：US20140217441A1

公开(公告)日：2014-08-07

申请号：US13906618

申请日：2013-05-31

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Jin-Dong SONG ,  Eunhye LEE ,  Min Hwan BAE ,  Won Jun CHOI ,  Jae Jin YOON ,  Il KI HAN

IPC: H01L31/0216 ,  H01L33/44

CPC classification number: H01L31/02168 ,  H01L33/44 ,  Y02E10/50

Abstract: In an aspect of the present disclosure, there is disclosed a manufacture method of an antireflection coating using a self-assembly nano structure, which includes forming a first metal droplet on a substrate by means of droplet epitaxy, depositing a first non-metal on the formed first metal droplet, and forming a first nano compound crystal by means of self-assembly of the deposited first non-metal and the first metal droplet.

Abstract translation: 在本公开的一方面，公开了使用自组装纳米结构的抗反射涂层的制造方法，其包括通过液滴外延在基板上形成第一金属液滴，在第一非金属上沉积第一金属液滴 形成第一金属液滴，并通过沉积的第一非金属和第一金属液滴的自组装形成第一纳米复合晶体。