专利检索 ap:("Kevin E. Moran" OR "Michael L. Smith" OR "Ernest R. Lippard, III") AND inv:"Ernest R. Lippard, III" 第 1 页

1.

发明授权
Method and apparatus for inspecting reticles 失效
标题翻译：检测标线的方法和装置

公开(公告)号：US4875780A

公开(公告)日：1989-10-24

申请号：US160194

申请日：1988-02-25

申请人： Kevin E. Moran , Michael L. Smith , Ernest R. Lippard, III

发明人： Kevin E. Moran , Michael L. Smith , Ernest R. Lippard, III

IPC分类号： G03F1/00 , G01N21/88 , G01N21/94 , G01N21/956 , G03F1/08 , G03F1/14 , H01L21/027 , H01L21/30 , H01L21/66

CPC分类号： G01N21/94 , G01N2021/95676 , G01N21/95607

摘要： A laser light inspection device for inspecting opposite surfaces of a workpiece with a low angle laser light beam. The laser light beam is directed in successive scans of a first and second sides in a repetitive manner using a pair of dividing mirrors and a pair of low angle mirrors. Light reflected by any debris back toward the direction of origin of the light beam is collected and analyzed.