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公开(公告)号:US06480008B2
公开(公告)日:2002-11-12
申请号:US09726383
申请日:2000-12-01
IPC分类号: G01R2726
CPC分类号: G01B7/003 , G01B7/023 , G01D5/2417
摘要: A capacitive distance sensor adapted to measure a distance between an object and the sensor device, which is suitable for determining surface configuration of an object includes a objective electrode, moving device for the objective electrode and a detecting means of moving distance of the objective electrode. The moving device is controlled depending on the signal from the objective electrode to position it in a predetermined range of clearance. The distance between the object and the sensor device is calculated based on the signals from the detecting means and the objective electrode.