公开(公告)号：US20150204804A1

公开(公告)日：2015-07-23

申请号：US14420160

申请日：2013-08-07

Applicant: Korea Institute of Science and Technology

Inventor： Man-Ho Kim

IPC: G01N23/207 ,  G01D5/48

CPC classification number: G01N23/2073 ,  G01D5/48 ,  G01N2223/331

Abstract: The detecting apparatus comprises: a monochromator, for Bragg-diffracting the incident beam; an analyzer, on which the beam diffracted by the monochromator is incident, an analyzer Bragg-diffracting the incident beam; a controller, for controlling the driver connected to the monochromator and the analyzer, so as to rotate the analyzer or the monochromator in a first direction and in a second direction opposite to the first direction; and a detector, for detecting the beam diffracted by the analyzer or transmitted through the analyzer while the analyzer or the monochromator is rotating and measuring a backlash and/or a slip of the driver by using the detected beam. The backlash detecting apparatus can measure a backlash and/or a slip in the unit of sub-arcsecond or sub-nanometer by using the radiation beam such as a neutron beam, an X-ray beam or the like.

Abstract translation: 检测装置包括：单色器，用于布拉格衍射入射光束; 由单色仪衍射的光束入射的分析仪，分析器布拉格衍射入射光束; 控制器，用于控制连接到单色器和分析器的驱动器，以便在第一方向和与第一方向相反的第二方向上旋转分析器或单色仪; 以及检测器，用于在分析器或单色仪旋转时检测由分析仪衍射的或通过分析器传输的光束，并且通过使用检测的光束来测量驾驶员的间隙和/或滑动。 齿隙检测装置可以通过使用诸如中子束，X射线束等的辐射束来测量亚弧秒或亚纳米单位中的间隙和/或滑移。

公开(公告)号：US09329144B2

公开(公告)日：2016-05-03

申请号：US14420160

申请日：2013-08-07

Applicant: Korea Institute of Science and Technology

Inventor： Man-Ho Kim

IPC: G01D5/48 ,  G01N23/207

CPC classification number: G01N23/2073 ,  G01D5/48 ,  G01N2223/331

Abstract: The detecting apparatus comprises: a monochromator, for Bragg-diffracting the incident beam; an analyzer, on which the beam diffracted by the monochromator is incident, an analyzer Bragg-diffracting the incident beam; a controller, for controlling the driver connected to the monochromator and the analyzer, so as to rotate the analyzer or the monochromator in a first direction and in a second direction opposite to the first direction; and a detector, for detecting the beam diffracted by the analyzer or transmitted through the analyzer while the analyzer or the monochromator is rotating and measuring a backlash and/or a slip of the driver by using the detected beam. The backlash detecting apparatus can measure a backlash and/or a slip in the unit of sub-arcsecond or sub-nanometer by using the radiation beam such as a neutron beam, an X-ray beam or the like.

Abstract translation: 检测装置包括：单色器，用于布拉格衍射入射光束; 由单色仪衍射的光束入射的分析仪，分析器布拉格衍射入射光束; 控制器，用于控制连接到单色器和分析器的驱动器，以便在第一方向和与第一方向相反的第二方向上旋转分析器或单色仪; 以及检测器，用于在分析器或单色仪旋转时检测由分析仪衍射的或通过分析器传输的光束，并且通过使用检测的光束来测量驾驶员的间隙和/或滑动。 齿隙检测装置可以通过使用诸如中子束，X射线束等的辐射束来测量亚弧秒或亚纳米单位中的间隙和/或滑移。