公开(公告)号：US20180151851A1

公开(公告)日：2018-05-31

申请号：US15826373

申请日：2017-11-29

Applicant: LG DISPLAY CO., LTD.

Inventor： Shin-Bok LEE ,  Tae-Joon SONG ,  Nam-Kook KIM ,  Soon-Sung YOO ,  Hwan-Keon LEE

IPC: H01L51/56 ,  H01L51/00 ,  B05C1/08

CPC classification number: H01L51/56 ,  B05C1/08 ,  C23C14/042 ,  C23C14/562 ,  C23C16/042 ,  C23C16/545 ,  H01L51/0011 ,  H01L51/0097

Abstract: Disclosed is a roll-to-roll substrate deposition apparatus which may control the width and length of a deposition area so as to adjust the size of a thin film. The roll-to-roll substrate deposition apparatus includes a deposition area controller disposed between a flexible substrate supplied to the inside of a chamber and a deposition unit supplying a deposition material to the flexible substrate so as to adjust the width and length of a thin film formed of the deposition material on one surface of the flexible substrate.