公开(公告)号：US20040173237A1

公开(公告)日：2004-09-09

申请号：US10792829

申请日：2004-03-05

Applicant: LG.Philips LCD Co., Ltd.

Inventor： Do-Hoon Park

IPC: B08B001/02

CPC classification number: H01L21/67115 ,  B08B7/0057 ,  C03C23/0075 ,  H01L21/67028

Abstract: A system for cleaning a substrate of flat panel display devices includes an ultraviolet source providing ultraviolet light, a driver for moving the ultraviolet source along a first direction, and a track extended along a second direction perpendicular to the first direction, wherein the substrate is disposed upon the track to be provided to the ultraviolet source.

Abstract translation: 用于清洁平板显示装置的基板的系统包括提供紫外光的紫外光源，用于沿着第一方向移动紫外线源的驱动器和沿着与第一方向垂直的第二方向延伸的轨道，其中基板设置 在轨道上提供给紫外线源。