专利检索 ap:("LINTFIELD LIMITED" OR "TOKYO ELECTRON LIMITED") AND inv:"Cong-Que DINH" 第 1 页

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发明申请
Modified Thioxanthone Photoinitiators 有权

公开(公告)号：US20230082557A1

公开(公告)日：2023-03-16

申请号：US17791834

申请日：2021-01-15

申请人： LINTFIELD LIMITED , TOKYO ELECTRON LIMITED

发明人： Christopher WALL , Cong-Que DINH , Seiji NAGAHARA

IPC分类号： G03F7/039 , C07D335/16 , C07D495/10 , C07D519/00 , G03F7/038

摘要： Latent photoinitiator compounds are described, as well as compositions containing such compounds and their uses in photoinitiated methods for producing photoresist structured.