公开(公告)号：US20020021731A1

公开(公告)日：2002-02-21

申请号：US09905640

申请日：2001-07-12

Applicant: Lambda Physik AG

Inventor： Igor Bragin ,  Juergen Kleinschmidt ,  Gerhard Ahlborn

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  B03C3/41 ,  B03C3/49 ,  B03C3/68 ,  B03C2201/04 ,  B03C2201/24 ,  H01S3/036

Abstract: An excimer or molecular fluorine laser system is provided which emits a laser beam during operation and has a gas mixture with a gas composition initially provided within a discharge chamber. The laser system includes a discharge chamber containing a laser gas mixture at least including a halogen-containing species and a buffer gas, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the gas mixture, a resonator for generating a laser beam, an electrostatic precipitator for having a voltage applied thereto and for receiving and precipitating contaminant particulates from a flow of the gas mixture, and a processor for monitoring the corona discharge ignition voltage of the electrostatic precipitator and for determining a status of said gas mixture based on the monitored voltage.

Abstract translation: 提供准分子或分子氟激光系统，其在操作期间发射激光束，并且具有最初设置在放电室内的气体组成的气体混合物。 激光系统包括：放电室，其包含至少包含含卤物质和缓冲气体的激光气体混合物，放电室内的多个电极，并连接到用于激励气体混合物的放电电路;激光束产生激光束 ，用于施加电压并用于从气体混合物流中接收和沉淀污染物颗粒的静电除尘器，以及用于监测静电除尘器的电晕放电点火电压并用于基于以下方式确定所述气体混合物的状态的处理器： 监测电压。