公开(公告)号：US20240401185A1

公开(公告)日：2024-12-05

申请号：US18329374

申请日：2023-06-05

Applicant: Li-Metal Corp.

Inventor： Maciej JASTRZEBSKI ,  Andrew SKOKO

IPC: C23C14/50 ,  C23C14/22 ,  C23C14/54

Abstract: A vapor deposition system includes a drum. The drum includes a generally cylindrical drum core. A process ring is fixedly disposed on the drum core at a position radially outward of the drum core. The process ring includes an inner face that extends radially, an outer face that extends radially opposite the inner face, and an outer-facing surface extending between the inner face and the outer face. The outer-facing surface has a plurality of axial channels formed therethrough. A plurality of fluid coolant passages extends through the process ring. An annular gas channel is in communication with the plurality of axial channels. A fluid conduit assembly is configured to supply a fluid coolant to the fluid coolant passages and a thermal coupling gas to the annular gas channel. The axial channels direct thermal coupling gas toward the substrate.