Abstract:
A correction device for an optical measuring apparatus obtains correction data for each scanning position of a light beam from an optical measuring apparatus that includes a light beam scanner which scans with a light beam a measuring region where a measured object is placed, and a light receiver which receives a transmitted light beam from the measuring region. The correction device includes a translucent scale having scale marks arranged at a predetermined pitch, and a support to mount the scale in the measuring region so that an arrangement direction of the scale marks is a scanning direction of the light beam.
Abstract:
An optical measuring device includes: an emission device configured to emit a scanning light, of which an optical axis parallely moves, to an object; a light receiving element configured to perform photoelectric conversion with respect to the scanning light after passing over the object; a calculation device configured to calculate, from a voltage wave obtained from time change of an electrical signal that is output by the light receiving element, a distance corresponding to a time range from a first edge with respect to a voltage value where the scanning light is not interrupted by the object and a second edge with respect to a voltage value where the scanning light is interrupted by the object, when a part of the scanning light is interrupted by the object for the time range.
Abstract:
A shape measuring apparatus includes: an irradiating part configured to irradiate work with a linear line laser, the irradiating part including: a light source configured to produce light; and an optical element configured to linearly spread the light from the light source and generate the line laser, the optical element being constructed rotatably around an optical axis of the line laser; and an imaging part configured to image the line laser reflected by the work.