公开(公告)号：US20210180943A1

公开(公告)日：2021-06-17

申请号：US17119246

申请日：2020-12-11

Applicant: MITUTOYO CORPORATION

Inventor： Hendrik KETELAARS ,  Adriaan Tiemen ZUIDERWEG ,  Lukasz REDLARSKI ,  John QUAEDACKERS

IPC: G01B11/22

Abstract: A method for measuring a height map of a test surface having a varying reflectivity using a multi-sensor apparatus including a pre-scan sensor and a height measuring sensor is disclosed. The multi-sensor apparatus further comprises one or more light sources configured to illuminate the test surface and a spatial light modulator. The spatial light modulator is placed in a light path between the one or more light sources and a measuring location of the multi-sensor apparatus and is configured to modulate light emitted from at least one of the light sources. The method comprises performing a measurement for determining an illumination intensity map of the test surface and a measurement for performing a height map of the test surface.