公开(公告)号：US20210180943A1

公开(公告)日：2021-06-17

申请号：US17119246

申请日：2020-12-11

Applicant: MITUTOYO CORPORATION

Inventor： Hendrik KETELAARS ,  Adriaan Tiemen ZUIDERWEG ,  Lukasz REDLARSKI ,  John QUAEDACKERS

IPC: G01B11/22

Abstract: A method for measuring a height map of a test surface having a varying reflectivity using a multi-sensor apparatus including a pre-scan sensor and a height measuring sensor is disclosed. The multi-sensor apparatus further comprises one or more light sources configured to illuminate the test surface and a spatial light modulator. The spatial light modulator is placed in a light path between the one or more light sources and a measuring location of the multi-sensor apparatus and is configured to modulate light emitted from at least one of the light sources. The method comprises performing a measurement for determining an illumination intensity map of the test surface and a measurement for performing a height map of the test surface.

公开(公告)号：US20190271535A1

公开(公告)日：2019-09-05

申请号：US16054340

申请日：2018-08-03

Applicant: MITUTOYO CORPORATION

Inventor： Han HAITJEMA ,  Hendrik KETELAARS

IPC: G01B11/12 ,  G01B11/255

Abstract: In a method and apparatus for measuring a property of a transparent tubular object, a laser beam scans the object, and laser light originating from the object is detected in a first detection direction parallel to the laser beam direction, or in the first and in a second detection direction at an angle thereto, in particular at 90°. The inner radius of the object may be calculated from the refractive index, scanning speed, outer diameter detected in the first detection direction, and, in the second detection direction, the time difference between laser light reflected from the outer surface of the object and laser light refracted into the object and reflected at the inner surface thereof. If the time of detecting laser light refracted into the object and reflected at the inner surface thereof in the first detection direction is known, the refractive index is not required.