公开(公告)号：US20190390947A1

公开(公告)日：2019-12-26

申请号：US16437765

申请日：2019-06-11

Applicant: MITUTOYO CORPORATION

Inventor： Takeshi KAWABATA ,  Kazuhiko HIDAKA

IPC: G01B5/20 ,  G01B5/012

Abstract: A measuring apparatus and a measuring method capable of measuring a surface of an object includes a movable body having a mounting portion on which the object is mounted, and first and second surfaces not coplanar with each other, a first scale portion provided to press the first surface and to measure a first scale position along a first scale axis parallel to a normal direction of the first surface, a second scale portion provided to press the second surface and to measure a second scale position along a second scale axis parallel to a normal direction of the second surface, a first probe having a reference point of position measurement set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis, and a second probe measuring a position along the probe axis.