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公开(公告)号:US20190390947A1
公开(公告)日:2019-12-26
申请号:US16437765
申请日:2019-06-11
Applicant: MITUTOYO CORPORATION
Inventor: Takeshi KAWABATA , Kazuhiko HIDAKA
Abstract: A measuring apparatus and a measuring method capable of measuring a surface of an object includes a movable body having a mounting portion on which the object is mounted, and first and second surfaces not coplanar with each other, a first scale portion provided to press the first surface and to measure a first scale position along a first scale axis parallel to a normal direction of the first surface, a second scale portion provided to press the second surface and to measure a second scale position along a second scale axis parallel to a normal direction of the second surface, a first probe having a reference point of position measurement set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis, and a second probe measuring a position along the probe axis.