公开(公告)号：US20240389302A1

公开(公告)日：2024-11-21

申请号：US18658787

申请日：2024-05-08

Applicant: Micron Technology, Inc.

Inventor： Jerome A. Imonigie ,  Chia Ying Lin ,  Davide Dorigo ,  Elisabeth Barr ,  Wan Rou Luo ,  Shi Han Wang ,  Sanjeev Sapra ,  Ashwin Panday ,  Vivek Yadav

IPC: H10B12/00

Abstract: Methods, systems, and devices for contact foot wet pullback with liner wet punch are described. A first etching operation may be performed on a stack of materials and a first insulative material to form a plurality of segments including contacts, the contacts formed from a first conductive material of the stack of materials and extending at least partially through the first insulative material. A first liner material may be deposited over the segments and the first insulative material, and a directional gas bias operation may be performed to transform a portion of the first liner material in contact with an extension of the contacts into a second liner material. A second etching operation may be performed to remove the second liner material and expose a surface of the extension, and a third etching operation may be performed remove at least a portion of the extension.